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- Ordering Information & Dimensions
- How To Order
- Specification
- Features
- Flow Chart
Ordering Information & Dimensions
| Part Number | End Connection | A | B | C | D | H | ||
| Inlet | Outlet | |||||||
| RCM5 | C-11W- | 1.125” W-Seal | 28.6 | 28.6 | 21.8 | 10.0 | 108 | |
| C-11C- | 1.125” C-Seal | 28.6 | 28.6 | 21.8 | 10.9 | 108 | ||
| Dimensions are for reference only and are subject to change without prior notice. | ||||||||
How To Order
| RCM5 | C | ▬▬ | 11W | ▬▬ | 31 | 0 | ▬▬ | 2 | H | ▬▬ | A | ||
| Regulator Type |
Connection Type |
Connection Size |
Inlet / Outlet Pressure |
Gauge Port Option |
Body Material |
Surface Finish |
Trim Material |
Seat Material |
Filter Option |
| Regulator Type | Outlet Pressure Range | Trim Material | |||||
| RCM5 | RCM5 Series | A | 100mm Hg absolute ~ 10 psig/ 100mm Hg absolute ~ 0.7 bar | H | Hastelloy® | ||
| Connection Type | 0 | 1~30 psig / 0.1~2.1 bar | Seat Material | ||||
| C-*W | W-Seal | 1 | 1~60 psig / 0.1~4.1 bar | None | PCTFE | ||
| C-*C | C-Seal | 2 | 1~100 psig / 0.1~6.9 bar | V | PI | ||
| 7 | Preset | T | PTFE | ||||
| Connection Size | F | PFA | |||||
| 11 | 1.125” | Gauge Port Option | |||||
| 0 | None (Fig. A) | Filter Option | |||||
| Maximum Inlet Pressure | 1 | 1/4 Internal UCR (Fig.B) | A | 40 ㎛ , 316L | |||
| 1 | 150 psig / 10.3 bar (0.06 Cv) | ||||||
| 3 | 150 / 10.3 bar psig (0.10 Cv) | Body Material | |||||
| 7 | Preset | 2 | 316L VAR Stainless Steel | ||||
| Internal Surface Finish | |||||||
| None | EP – Electro Polished | ||||||
| BA | BA | ||||||
Specification
| Pressure Ratings | |||||
| Per criteria of ANSI/ASME B31.3 | Filter | ||||
| Max. Inlet Pressure | 150 psig (10.3 bar) | Removal Size | 40 ㎛ | ||
| Outlet Pressure Range |
100 mm
Hg absolute~10 psig (100mm Hg absolute~0.7bar) 30, 60, 100 psig (2.1, 4.1, 6.9 bar) |
||||
| Media Contact Materials | |||||
| Body | 316L Stainless Steel | ||||
| Design Proof Pressure | 150% of maximum rated | Diaphragm | Hastelloy® | ||
| Seat | PCTFE (Optional PTFE, PFA) | ||||
| Operating Temperature | Spring | 316 Stainless Steel or Inconel® | |||
| PCTFE Seat | -40~60℃ (-40℉~140℉) | Poppet, Retainer | 316 Stainless Steel or Hastelloy® | ||
| Pl Seat | -40~177℃ (-40℉~350℉) | Filter | 316L | ||
| PFA Seat | -40~71℃ (-40℉~160℉) | ||||
| PTFE Seat | -40~71℃ (-40℉~160℉) | Internal Surface Finish | |||
| Description | Surface Finish(µm) | ||||
| Flow Capacity | Average | Maximum | |||
| Flow Capacity | 0.06 Cv (Optional 0.10 Cv) | BA | <0.4 | <1.6 | |
| EP | <0.125 | <0.4 | |||
| Helium Leak Test | |||||
| Inboard Leak Rate | 1x10 atm cc/sec | ||||
Features
| · The
RCM5 series, an ultra high purity pressure reducing regulator, provides
precise performance and repeatability · Compact size · Low internal volume · Metal to metal diaphragm seals provide enhanced leak integrity · Optimum performance and cleanliness at a great value · All performed in Class 100 and Class 10 clean rooms · The built-in filter protects the regulator from system particles |
 |
Flow Chart
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